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Products  
Semiconductor Apparatus D- bot

- For Safe & Convenient Preventive Maintenance


For your Safety

Assemble and disassemble quartz tube
and manifold Ass’y away from the tool
Can avoid remainder gas inside diffusion furnace loading area.

Easy Preventive Maintenance

With special cabinet designed by PFK,
install pre-assembled manifold tube Assy’ at onec.



 






Headquater : 139, Oesammi-ro, Osan-si, Gyeonggi-do, Korea / TEL : 82-31-202-4313 FAX : 82-31-202-4516 / Email: sales@pfkco.com
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